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Yonsei University.

서환석 교수
서환석
Education
  • 1988 ~ 1993

    서울대학교 금속공학과 학사

  • 1993 ~ 1995

    서울대학교 금속공학과 석사

  • 2000 ~ 2005

    Ph.D. in Materials Science and Engineering, University of Illinois at Urbana-Champaign

Career
  • 1995 ~ 1999

    현대전자산업 Memory연구소 (Thin Film 공정 담당 Sr. Engineer)

  • 2006 ~ 현재

    삼성전자 반도체연구소 (EUV Lithography, Photomask 공정 담당 Principal Engineer & Technology Leader)

  • 2023 ~ 현재

    연세대학교 신소재공학과 (산학협력중점교수, 겸임교수)

Research Interests
- EUV Lithography, Optics Design and Simulation
- Photomask Materials (Mask Blank, Pellicle, PSM), Process, and Equipment
- Thin Film Process (PVD, CVD, ALD) and Analysis (Microstructure, Physical properties)
- [강의] 반도체제품공학특론 / Advanced Lithography
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